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Suppliers for wet etch chucks for MEMS?
Source：Internet Author：Unknow Pubdate：2008-05-06  
dalnim (Materials) 27 Dec 07 20:22
Does anyone know suppliers info for wet etch chucks for MEMS?
I'd like to know what companies are supplying chucks that protect one side of a wafer from the chemical during wet processes(such as acid or alkali solutions).

Thanks,
dalnim

IRstuff (Aerospace) 27 Dec 07 21:40
Usually, you have an oxide for etch protection.  The backside of a wafer is too rough to seal against a chuck for etch resistance. TTFN

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